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Courteille, C.a, Hollenstein Ch.a Dorier Gay Schwarzenbach Howling Bertran Viera Martins Macarico J. - L. a. "Particle agglomeration study in in silane plasmas: In situ study by polarization-sensitive laser light scattering." \i Journal of Applied Physics\i0 . 80 (1996): 2069-2078.\par \par }