@conference {Pereyra1985717,
	title = {ELECTRO-OPTICAL CHARACTERIZATION OF AMORPHOUS SILICON FILMS DEPOSITED IN A TWO CONSECUTIVE DECOMPOSITION AND DEPOSITION CHAMBERS SYSTEM.},
	booktitle = {Commission of the European Communities, (Report) EUR},
	year = {1985},
	note = {<p>cited By 0</p>
},
	pages = {717-721},
	abstract = {<p>Doped and undoped a-Si:H and a-SiC:H films were deposited by R. F. decomposition of silane and silane/methane mixtures respectively, in a two consecutive (decomposition and deposition) chambers glow discharge capacitively coupled system. Their electro-optical properties were extensively investigated through dark conductivity, photoconductivity, spectral response, optical absorption, R. F. transmission spectra, electron spin ressonance and CxV MOS measurements.</p>
},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-0022176794\&partnerID=40\&md5=ca20fbf9855ee0ac6978efeb951b8791},
	author = {Pereyra, I., Andrade, A.M., Sanematsu, M.S., Martins, R.}
}
