@article {Elangovan20075512,
	title = {Preliminary studies on molybdenum-doped indium oxide thin films deposited by radio-frequency magnetron sputtering at room temperature},
	journal = {Thin Solid Films},
	volume = {515},
	number = {13},
	year = {2007},
	note = {<p>cited By 10</p>
},
	pages = {5512-5518},
	abstract = {<p>Thin films of molybdenum-doped indium oxide (IMO) were prepared by a 3-source, cylindrical radio-frequency magnetron sputtering at room temperature. The films were post-annealed and were characterized by their structural (X-ray diffraction) and optical (UV-VIS-NIR spectrophotometer) properties. The films were studied as a function of oxygen volume percentage (O2 vol.\%) ranging from 3.5 to 17.5. The structural studies revealed that the as-deposited amorphous films become crystalline on annealing. In most cases, the (222) reflection emerged as high intensive peak. The poor visible transmittance of the films as-deposited without oxygen was increased from \~{} 12\% to over 80\% on introducing oxygen (3.5 O2 vol.\%). For the films annealed in open air, the average visible transmittance in the wavelength ranging 400-800~nm was varied between 77 and 84\%. The films annealed at high temperatures (\&gt; 300~{\textdegree}C) decreased the transmittance to as low as \&lt; 1\%. The optical band gap of the as-deposited films increased from the range 3.83-3.90 to 3.85-3.98~eV on annealing at different conditions. {\textcopyright} 2007 Elsevier B.V. All rights reserved.</p>
},
	doi = {10.1016/j.tsf.2007.01.022},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-34047112710\&partnerID=40\&md5=1d7e1f91af44a815558192d307bc8dda},
	author = {Elangovan, E., Marques, A., Fernandes, F.M.B., Martins, R., Fortunato, E.}
}
