@article {Neves20124381,
	title = {Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: Processing and application},
	journal = {Journal of the European Ceramic Society},
	volume = {32},
	number = {16},
	year = {2012},
	note = {<p>cited By 27</p>
},
	pages = {4381-4391},
	abstract = {<p>This work reports the production of ceramic targets based on nanostructured Al-doped ZnO (AZO) powders for sputtering applications. The nanostructured powder is obtained by a new patented process based on the detonation of an emulsion containing both Zn and Al metal precursors in the final proportion of 98:2wt\% (ZnO:Al 2O 3), through which the Al contains is highly uniform distributed over ZnO. Due to the nanostructured powder characteristics, the targets can be sintered at substantially lower temperatures (1150-1250{\textdegree}C) by conventional sintering, contributing to production costs reduction of ceramic targets and consequently the costs of photovoltaic and displays industries. Electrical resistivity values around 3.0-7.0{\texttimes}10 -3Ωcm have been obtained depending on final microstructure of the targets. The electro-optical properties of the films produced at room temperature with thicknesses around 360nm, besides being highly uniform exhibit a resistivity of about 1{\texttimes}10 -3Ωcm and a transmittance in the visible range above 90\%. {\textcopyright} 2012 Elsevier Ltd.</p>
},
	doi = {10.1016/j.jeurceramsoc.2012.08.007},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84866839575\&partnerID=40\&md5=83afb5f2dc54eeddeb0744800219c701},
	author = {Neves, N.a b , Barros, R.a b , Antunes, E.a , Calado, J.a , Fortunato, E.b , Martins, R.b , Ferreira, I.b}
}
