@article {8021,
	title = {Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering},
	journal = {Materials Science in Semiconductor Processing},
	volume = {7},
	number = {4-6},
	year = {2004},
	note = {<p>Times Cited: 10Symposium on New Materials in Future Silicon Technology Held at the E-MAR 2004 Spring Meeting2004Strasbourg, FRANCE</p>
},
	month = {Aug-Dec},
	pages = {243-247},
	abstract = {n/a},
	isbn = {1369-8001},
	url = {<Go to ISI>://WOS:000225855200015},
	author = {Barquinha, P. and Pereira, L. and Aguas, H. and Fortunato, E. and Martins, R.}
}
