@article {Silva2004,
	title = {{Silicon etching in CF(4)/O(2) and SF(6) atmospheres}},
	volume = {455-456},
	year = {2004},
	note = {n/a},
	pages = {120{\textendash}123},
	abstract = {n/a},
	url = {http://apps.isiknowledge.com/full\_record.do?product=UA\&search\_mode=GeneralSearch\&qid=11\&SID=Z1nIo6NpO6CoGE2nDij\&page=3\&doc=114},
	author = {Silva, M. A. G., and A and Raniero and L and Ferreira and E}
}
