@article {Pereira2004,
	title = {{Sputtering preparation of silicon nitride thin films for gate dielectric applications}},
	volume = {455-456},
	year = {2004},
	note = {n/a},
	pages = {69{\textendash}72},
	abstract = {n/a},
	url = {http://apps.isiknowledge.com/full\_record.do?product=UA\&search\_mode=GeneralSearch\&qid=11\&SID=Z1nIo6NpO6CoGE2nDij\&page=3\&doc=109},
	author = {Pereira and L and Aguas and H and Igreja and R}
}
