Production and decay of chlorine ion excited species in an electron cyclotron resonance ion source plasma

Citation:
Santos, J. P., M. C. Martins, A. M. Costa, J. P. Marques, P. Indelicato, and F. Parente. "Production and decay of chlorine ion excited species in an electron cyclotron resonance ion source plasma." Physica Scripta T144 (2011): 014005.

Abstract:

The most important processes for the creation of chlorine ion excited states from the ground configurations of Cl 10+ to Cl 15+ ions in an electron cyclotron resonance ion source, leading to the emission of K x-ray lines, were studied. Theoretical values for inner-shell excitation and ionization cross-sections, including double KL and triple KLL ionization, transition probabilities and energies for the de-excitation processes, were calculated in the framework of the multi-configuration Dirac–Fock method. With reasonable assumptions about the electron energy distribution, a theoretical Kα x-ray spectrum was obtained, which was then compared with recent experimental data.

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