%0 Journal Article %J Vacuum %D 1994 %T Engineering of the energy coupling in PECVD systems used to produce large area a-Si: H coatings %A Martins, R. %A Ferreira, I. %I Elsevier %N 10 %P 1107-1108 %V 45 %X n/a %Z n/a %@ 0042-207X