{\rtf1\ansi\deff0\deftab360

{\fonttbl
{\f0\fswiss\fcharset0 Arial}
{\f1\froman\fcharset0 Times New Roman}
{\f2\fswiss\fcharset0 Verdana}
{\f3\froman\fcharset2 Symbol}
}

{\colortbl;
\red0\green0\blue0;
}

{\info
{\author Biblio}{\operator }{\title Biblio RTF Export}}

\f1\fs24
\paperw11907\paperh16839
\pgncont\pgndec\pgnstarts1\pgnrestart
Martins, R., I. Ferreira, CN Carvalho, A. Ma\'e7arico, and L. Guimaraes. "Engineering of PECVD Systems for Macroelectronic Applications." \i MRS Proceedings\i0 . 258.1 (1992).\par \par }