@article {5627,
	title = {Role of the gas flow parameters on the uniformity of films produced by PECVD technique},
	journal = {MRS Proceedings},
	volume = {467},
	year = {1997},
	note = {n/a},
	publisher = {Cambridge Univ Press},
	abstract = {n/a},
	author = {Martins, R. and Macarico, A and Ferreira, I. and Fortunato, E.}
}
