@article {5612,
	title = {Correlation between the carbon and hydrogen contents with the gas species and the plasma impedance of silicon carbide films produced by PECVD technique},
	journal = {Applied surface science},
	volume = {184},
	year = {2001},
	note = {n/a},
	pages = {101-106},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0169-4332},
	author = {Martins, R. and Silva, V. and {\'A}guas, H. and Cabrita, A. and Ferreira, I. and Fortunato, E.}
}
