@article {5606, title = {Plasma Diagnostic of a TCDDC System Using a Quadropole Mass Spectrometer}, journal = {MRS Proceedings}, volume = {149}, year = {1989}, note = {n/a}, publisher = {Cambridge Univ Press}, abstract = {n/a}, author = {Vieira, M and Ma{\c c}arico, A and Martins, R. and Ferreira, I. and Guimar{\={a}}es, L} }