@article {5575,
	title = {Engineering of PECVD Systems for Macroelectronic Applications},
	journal = {MRS Proceedings},
	volume = {258},
	year = {1992},
	note = {n/a},
	publisher = {Cambridge University Press},
	abstract = {n/a},
	author = {Martins, R. and Ferreira, I. and Carvalho, CN and Ma{\c c}arico, A and Guimaraes, L}
}
