@article {5554,
	title = {Silicon nanostructure thin film materials},
	journal = {Vacuum},
	volume = {64},
	year = {2002},
	note = {n/a},
	pages = {219-226},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0042-207X},
	author = {Martins, R. and {\'A}guas, H. and Silva, V. and Ferreira, I. and Cabrita, A. and Fortunato, E.}
}
