@article {5542,
	title = {Engineering of the energy coupling in PECVD systems used to produce large area a-Si: H coatings},
	journal = {Vacuum},
	volume = {45},
	year = {1994},
	note = {n/a},
	pages = {1107-1108},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0042-207X},
	author = {Martins, R. and Ferreira, I.}
}
