@article {5518,
	title = {Role of the deposition parameters in the uniformity of films produced by the plasma-enhanced chemical vapour deposition technique},
	journal = {Philosophical Magazine B},
	volume = {76},
	year = {1997},
	note = {n/a},
	pages = {259-272},
	publisher = {Taylor \& Francis},
	abstract = {n/a},
	isbn = {1364-2812},
	author = {Martins, R. and Ma{\c c}arico, A and Ferreira, I. and Fidalgo, J and Fortunato, E.}
}
