Raniero, Leandro, Rodrigo Martins, Hugo Águas, S. Zang, Isabel Ferreira, Lu{\'?s Pereira, Elvira Fortunato, and L. Boufendi. "Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz." Materials Science Forum. Vol. 455. Trans Tech Publications,  2004. 532-535.