@conference {aguas2004mis,
	title = {MIS Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 MHz PECVD Discharge},
	booktitle = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {73{\textendash}76},
	publisher = {Trans Tech Publications},
	organization = {Trans Tech Publications},
	abstract = {n/a},
	author = {{\'A}guas, Hugo and Pereira, Lu{\'{\i}s and Raniero, Leandro and Fortunato, Elvira and Martins, Rodrigo}
}
