@conference {pereira2004sputtering,
	title = {Sputtering preparation of silicon nitride thin films for gate dielectric applications},
	booktitle = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {69{\textendash}72},
	publisher = {Trans Tech Publications},
	organization = {Trans Tech Publications},
	abstract = {n/a},
	author = {Pereira, Lu{\'{\i}s and {\'A}guas, Hugo and Igreja, Rui and Martins, Rui Miguel S and Nedev, N. and Raniero, Leandro and Fortunato, Elvira and Martins, Rodrigo}
}
