@conference {raniero2004growth,
	title = {Growth of polymorphous/nanocrystalline silicon films deposited by PECVD at 13.56 MHz},
	booktitle = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {532{\textendash}535},
	publisher = {Trans Tech Publications},
	organization = {Trans Tech Publications},
	abstract = {n/a},
	author = {Raniero, Leandro and Martins, Rodrigo and {\'A}guas, Hugo and Zang, S and Ferreira, Isabel and Pereira, Lu{\'{\i}s and Fortunato, Elvira and Boufendi, L}
}
