@conference {silva2004silicon,
	title = {Silicon etching in CF4/O2 and SF6 atmospheres},
	booktitle = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {120{\textendash}123},
	publisher = {Trans Tech Publications},
	organization = {Trans Tech Publications},
	abstract = {n/a},
	author = {Silva, A. and Raniero, Leandro and Ferreira, E and {\'A}guas, Hugo and Pereira, Lu{\'{\i}s and Fortunato, Elvira and Martins, Rodrigo}
}
