@article {aguas2002influence,
	title = {Influence of a DC grid on silane rf plasma properties},
	journal = {Vacuum},
	volume = {64},
	number = {3},
	year = {2002},
	note = {n/a},
	pages = {387{\textendash}392},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {{\'A}guas, Hugo and Fortunato, Elvira and Martins, Rodrigo}
}
