@article {aguas2000plasma,
	title = {Plasma diagnostics of a PECVD system using different RF electrode configurations},
	journal = {Vacuum},
	volume = {56},
	number = {1},
	year = {2000},
	note = {n/a},
	pages = {31{\textendash}37},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {{\'A}guas, H. and Martins, R. and Fortunato, E.}
}
