@article {zhang2004characterization,
	title = {Characterization of silicon carbide thin films prepared by VHF-PECVD technology},
	journal = {Journal of non-crystalline solids},
	volume = {338},
	year = {2004},
	note = {n/a},
	pages = {530{\textendash}533},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {Zhang, S. and Raniero, L. and Fortunato, E. and Pereira, L. and N. Martins and Canhola, P. and Ferreira, I. and Nedev, N. and Aguas, H. and Martins, R.}
}
