@article {aguas2003large,
	title = {Large area deposition of polymorphous silicon by plasma enhanced chemical vapor deposition at 27.12 MHz and 13.56 MHz},
	journal = {Japanese journal of applied physics},
	volume = {42},
	number = {8R},
	year = {2003},
	note = {n/a},
	pages = {4935},
	publisher = {IOP Publishing},
	abstract = {n/a},
	author = {{\'A}guas, H. and Silva, V. and Fortunato, E. and Lebib, S and i Cabarrocas, P Roca and Ferreira, I. and Guimar{\~a}es, L and Martins, R.}
}
