@article {pereira2004performances,
	title = {Performances of hafnium oxide produced by radio frequency sputtering for gate dielectric application},
	journal = {Materials Science and Engineering: B},
	volume = {109},
	number = {1},
	year = {2004},
	note = {n/a},
	pages = {89{\textendash}93},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {Pereira, L. and Marques, A. and {\'A}guas, H. and Nedev, N. and Georgiev, S and Fortunato, E. and Martins, R.}
}
