@article {10266, title = {Automated rf-PERTE system for room temperature deposition of TCO coatings}, journal = {Energy Procedia }, volume = {102}, year = {2016}, pages = {96}, author = {Fernandes M. and Vygranenko Y. and Vieira M. and Lavareda G. and Nunes de Carvalho C. and Amaral A.} }