@article {10266,
	title = {Automated rf-PERTE system for room temperature deposition of TCO coatings},
	journal = {Energy Procedia },
	volume = {102},
	year = {2016},
	pages = {96},
	author = {Fernandes M. and Vygranenko Y. and Vieira M. and Lavareda G. and Nunes de Carvalho C. and Amaral A.}
}
