Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

Citation:
Pereira, L., P. Barquinha, E. Fortunato, and R. Martins. "Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide." Materials Science and Engineering B-Solid State Materials for Advanced Technology. 118 (2005): 210-213.

Abstract:

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Notes:

Times Cited: 33Symposium on Functional Oxides for Advanced Semiconductor TechnologiesMay 24-28, 2004Strasbourg, FRANCEUniv Degli Studi Catania; Natl Inst Sci & Technol Mat

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