Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering
- Citation:
- Barquinha, P., L. Pereira, H. Aguas, E. Fortunato, and R. Martins. "Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering." Materials Science in Semiconductor Processing. 7 (2004): 243-247.
Abstract:
n/a
Notes:
Times Cited: 10Symposium on New Materials in Future Silicon Technology Held at the E-MAR 2004 Spring Meeting2004Strasbourg, FRANCE
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