@article {8021, title = {Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering}, journal = {Materials Science in Semiconductor Processing}, volume = {7}, number = {4-6}, year = {2004}, note = {
Times Cited: 10Symposium on New Materials in Future Silicon Technology Held at the E-MAR 2004 Spring Meeting2004Strasbourg, FRANCE
}, month = {Aug-Dec}, pages = {243-247}, abstract = {n/a}, isbn = {1369-8001}, url = {